| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a surface acoustic wave element which is excellent in migration resistance and can contribute to the improvement of working precision and production efficiency. SOLUTION: A1 is deposited on the surface of a piezoelectric substrate 1 to be etched to be a pattern obtained by negatively inverting an electrode pattern, and Cu or a Cu-based alloy is deposited so as to cover an obtained A1 pattern 2. A Cu film 3 is flattened by CMP and when the surface of the A1 pattern 2 appears, it is finished. A Cu electrode 3 is obtained by removing the A1 pattern 2. Thus, Cu electrode can be formed precisely and with high production efficiency by patterning A1 easy to work and burying Cu in a part where the A1 pattern never exists and removing the A1 pattern.
|
