METHOD FOR COATING ELECTROMAGNETIC WAVE SHIELDING FILM AND APPARATUS THEREOF

摘要

PURPOSE: A method for coating an electromagnetic wave shielding film and an apparatus thereof is provided to gain a stable and excellent electromagnetic wave shielding effect in a wide frequency range by composing an electromagnetic wave shielding film of double metal film consist of a copper and a stainless film. CONSTITUTION: A spin jig(3) is installed on the inside of a chamber(1). A plurality of objects to be coated(2) is mounted on the spin jig(3). A jig spin unit(4) is installed on the rear of the spin jig(3) and rotates the spin jig(3) in a constant speed. A jig shifting unit(5) is installed on the lower side of the spin jig(3) and puts in or takes out the spin jig(3) into the inside of the chamber(1). A plurality of targets(6a,6b) is arranged on the inside of the chamber(1) to become a cathode. A controller(7) is installed on the one side of the chamber(1), supplies a power source, and controls the operation of a coating apparatus. A jig conveyer(8) is installed on an external side of the chamber(1) and puts the spin jig(3) thereon.