| 摘要 |
PROBLEM TO BE SOLVED: To make an alignment mark produceable without requiring much labor and, at the same time, surely detectable by means of a measuring apparatus. SOLUTION: A contact hole 4 and an alignment groove 5 are formed through an insulating layer 2 by etching the layer 2 until the bottoms of the hole 4 and groove 5 reach a first metallic layer 3, and a metal 6 is caused to deposit in the groove 5 and hole 4. Continuously, the surface of the metal 6 is caused to subside within the positioned extent of the groove 5 by the CMP method, so as to form a profile for the alignment mark formed on a second metallic layer 9 caused to deposit on the insulating layer 2. |
