COMPOSITION FOR FORMING THIN METAL OXIDE FILM

摘要

A composition from which a thin metal oxide film containing zirconium oxide as the main component can be easily formed on a surface of a substrate. The composition comprises a zirconium ingredient and one or more ingredients of a metal other than zirconium. The zirconium ingredient is a salt of an amine with a zirconium complex or zirconium salt formed from an aminopolycarboxylic acid and a zirconium compound. The ingredients of a metal other than zirconium are compounds of a metal other than zirconium. In the composition, the proportion of the zirconium ingredient is 70 to 98 mol% in terms of zirconium oxide and that of the ingredients of a metal other than zirconium is 2 to 30 mol% in terms of the oxide of the metal, based on all the metal ingredients. By using the composition, a member having a thin metal oxide film excellent in chemical stability, thermal stability, and mechanical strength is obtained.