CALIBRATION PROCESS FOR SHAPE MEASUREMENT

摘要

A calibration method for a shape measurement with a variable distance between the scanning probe datum point (43) and the measuring point (51) on the surface of a workpiece, is provided. Based on the measured distance between the scanning probe datum point (43) and each of a plurality of measuring points (51) on the surface of a calibration object (50), and on the position of a reference point (31) on a motion system platform on which the scanning probe assembly (41) is mounted, corresponding to the scanning probe (41) being in a sensing position of each of the plurality of measuring points (51), the method provides the necessary data for calculating the coordinate of a measuring point (51) of the workpiece from the measured distance between the scanning probe datum point (43) and the measuring point (51), and from the position of the reference point (31) corresponding to the scanning probe (41) being in a sensing position of the measuring point (51).