| 摘要 |
<p>Methods and apparatus for optically probing an electrical device (12) while the device is operating under control of a tester of the kind that applies test vectors and that has a test head in which the device can be mounted. An optical probe system has a light delivery and imaging module (16) that is configured to be docked to a test head and that has imaging optics and a fine scanner. An optical processing subsystem can generate an incoming beam of light to illuminate the device through an optical fiber end (104) in the module. The fiber end is mounted in a fixed position on the optical axis of the imaging optics, and the fiber end and imaging optics are mounted in a fixed position to the platform of the fine scanner. Operating the fine scanner moves the fiber end, the imaging optics, the optical axis, and the focal point as a rigid unit.</p> |
