Plasma treatment of substrate surfaces by ion bombardment involves generating plasma from gas using spark ignited and maintained by alternating voltage

摘要

The method involves generating a plasma from a supplied gas using a light arc and accelerating the ions through an electric potential onto the substrate (3). The light arc or spark can be ignited and maintained using an alternating voltage, especially with a frequency between 1 Hz and 4 MHz and especially about 1.765 MHz. Alternatively, the spark can be ignited and maintained using a direct voltage. Independent claims are also included for the following: an arrangement for implementing the method.