发明名称 Method for setting the threshold voltage of a MOS transistor
摘要 A method for setting the threshold voltage of a MOS transistor having a gate composed of polysilicon includes the step of implanting germanium ions into the gate composed of polysilicon in order to change the work function of the gate.
申请公布号 US2001023116(A1) 申请公布日期 2001.09.20
申请号 US20010811799 申请日期 2001.03.19
申请人 WURZER HELMUT;CURELLO GUISEPPE 发明人 WURZER HELMUT;CURELLO GUISEPPE
分类号 H01L21/28;H01L21/8238;H01L27/092;H01L29/49;H01L29/51;(IPC1-7):H01L21/425 主分类号 H01L21/28
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