| 摘要 |
<p>A capacitance type humidity sensor having at least two metal electrodes which is excellent in stability to humidity, temperature dependence, response speed, etc. and capable of considerably changing in capacitance. A preferred embodiment of the sensor has, interposed between the electrodes, a moisture-sensitive layer comprising a polyimide resin. The polyimide preferably has a group represented by the formula (1) or (2). (1) (R?1 and R2¿ each is a single bond or an optionally substituted C¿1-20? hydrocarbon group.) (2) (R?3, R4, R6, and R7¿ each is alkyl or halogeno; R5 is a single bond, -SO¿2?-, -CO-, -O-, -S-, alkylene, or arylene; m and n each is an integer of 0 to 4; and p and q each is an integer of 0 to 4.)</p> |
