FLUOROALKYLONIUM SALT TYPE CATION OR ACID GENERATOR GENERATING CATION OR ACID UPON IRRADIATION WITH ENERGY RAY

摘要

A cation or acid generator which, upon irradiation with energy rays, can generate cations or an acid with high sensitivity and which is suitable for use in chemical amplification type resist materials. It comprises an energy-ray-sensitive fluoroalkylonium salt represented by the formula (1) in which R<1> to R<3> (each is alkyl, aryl, etc.) and Rf (fluoroalkyl) are bonded to the central element A (iodine, sulfur, selenium, tellurium, nitrogen, or phosphorus). Also provided is a chemical amplification type resist material which contains the acid generator.