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发明名称
Verfahren zum Bestimmen von Kontaminationen mittels Photoemission
摘要
申请公布号
DE4106841(C2)
申请公布日期
2001.09.20
申请号
DE19914106841
申请日期
1991.03.04
申请人
TENCOR INSTRUMENTS, MOUNTAIN VIEW
发明人
STOKOWSKI, STANLEY;WOLZE, DAVID;NEUKERMANS, ARMAND P.
分类号
G01B11/06;G01N23/227;(IPC1-7):G01N23/227;H01L21/66
主分类号
G01B11/06
代理机构
代理人
主权项
地址
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