Actuator for oscillator

摘要

An actuator for an oscillator which is capable of minimizing the fluctuation of the detection error of the oscillation condition of an electrostatic driven oscillator and shortening rise time of the oscillation amplitude of the electrostatic driven oscillator during starting. An actuator oscillates a drive frame and a detecting frame in the X-direction by outputting the drive signal to an electrode and detects the displacement of the drive frame in the X-direction as the displacement signal. The actuator generates a direct-current voltage component of the drive signal controlled to be increased or decreased based on the detected displacement signal and an alternating voltage component of the drive signal having a constant amplitude to maintain the constancy of the oscillation amplitude of the drive frame based on the detected displacement signal. During starting, the actuator generates an alternating voltage component of the drive signal having a larger amplitude compared to at normal operation condition.