| 摘要 |
An evaporation apparatus, particularly for forming thin metallization layers on a substrate, comprising a vacuum chamber provided with an inlet opening or port and an outlet opening or port, wherein the vacuum chamber comprises means for transporting at least one substrate from the inlet opening to the outlet opening, at least one evaporation source being provided within the vacuum chamber; the evaporation source is movable inside the vacuum chamber, for directing a jet of vaporized material against the substrate in order to obtain a metallization layer.
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