发明名称 Apparatus for mounting semiconductor chips on a substrate
摘要 <p>The device displaces the substrate (1) in steps in a first direction (x) to a bonding station to make the next substrate position (2) available. A sensor (12) is provided for determining the position of a longitudinal edge (4) of the substrate relative to a second direction (y) orthogonal to the first direction. The sensor consists of measurement and reference light barriers.</p>
申请公布号 EP1134788(A1) 申请公布日期 2001.09.19
申请号 EP20000810229 申请日期 2000.03.17
申请人 ESEC TRADING SA 发明人 MANNHART, EUGEN, DR.;ENZLER, AUGUST;ODERMATT, ANDRE
分类号 H01L21/52;H01L21/00;H01L21/68;(IPC1-7):H01L21/00 主分类号 H01L21/52
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