Apparatus for producing a flux of charge carriers

摘要

Apparatus for producing a flux of charge carriers that may be used in many applications including imaging and lithography comprises an electron source (1) which includes an emitter (8) with a tip radius of about one nanometre and a closely configured extractor (10), together with a specimen (16) for receiving an electron beam (P) from the source. The apparatus may operate in air under atmospheric conditions and at a much reduced operating voltage. <IMAGE>