Control of oxygen concentration in single crystal pulled up from melt containing group-V element
摘要
<p>The amount of Group-V element included in a melt 6 has the close relationship with the oxygen concentration of the melt 6. This relationship is utilized for controlling the oxygen concentration of a single crystal 8 at a high level. The content of Group-V element is calculated from the weight of the melt 6 gauged by a gravimeter 11 and compared with a preset value in a control unit 12. When the calculated content is smaller than the preset value, the control signal to additionally supply Group-V element to the melt 6 is outputted from the control unit 12 to a feeder 14. When the calculated content is larger than the preset value, the control signal to supply a raw material to the melt 6 is outputted to another feeder 13. <IMAGE></p>
申请公布号
EP0625595(B1)
申请公布日期
2001.09.19
申请号
EP19940104297
申请日期
1994.03.18
申请人
RESEARCH DEVELOPMENT CORPORATION OF JAPAN;TOSHIBA CERAMICS CO., LTD.;KABUSHIKI KAISHA TOSHIBA