| 摘要 |
A method of removing sterilization gas from a load disposed in a chamber. In accordance with the method, the chamber is evacuated to a subatmospheric pressure. A diffusion gas comprising helium is provided. An amount of the diffusion gas is introduced into the chamber effective to create a superatmospheric diffusion pressure in the chamber. The diffusion gas is allowed to diffuse throughout the chamber to displace sterilization gas from the load. The chamber is evacuated to remove portions of the diffusion gas and the sterilization gas from the chamber.
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