Planar vibratory gyroscopes

摘要

Planar vibratory gyroscope structures are provided which are inherently symmetric, which facilitate the use of simple monolithic fabrication processes and which enable the use of sensitive control and sense systems. A planar vibratory member of these structures has a hollow frame, a plate that has a plate perimeter and is positioned within the frame and a plurality of elongate beams which couple the plate to the frame wherein each of the beams is proximate to and substantially parallel to a respective portion of the plate perimeter. The exterior rim of the planar member can be supported by a substrate which provides room for easy access to the plate with mode control and sense systems.