Process for fabricating three-dimensional polymer layer structures

摘要

A process for the fabrication of polymer layers structured in three dimensions, such as of lenses, which are applied to the end of optical fibers or of laser light sources. Dry resist that is polymerizable through exposure is used as a base substance. The dry resist is applied to a substrate and is exposed with a dose apportionment that is predefined as a function of space and time in a structure region. The structure region is precalculated with submicrometer precision using image-processing methods and exhibits the form of the desired lens. The lens-shaped structure region that is polymerized through exposure is removed from the unexposed dry resist. The process of the present invention makes it possible to place lenses on an optical fiber or a laser with submicrometer precision.