| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an ink jet printer head in which a barrier wall of two layer structure is formed easily with no positional shift such that no level difference is present in the inner wall of an ink pressurizing chamber. SOLUTION: A first negative type barrier wall member 32 is laid on the entire surface of a chip substrate 30 on which heating elements 31 are formed and subjected to mask exposure thus forming unexposed parts 32-2 at the pit parts surrounding the heating elements 31 from four ways and exposed parts 32-1 at other parts. A second negative type barrier wall member 33 is laid thereon prior to development and subjected similarly to mask exposure thus forming exposed parts 33-1 for making a barrier wall sectioning a seal wall and an ink channel and unexposed parts 33-2 serving as ink channels. Since the exposing width W3 of the first barrier wall member 32 is set narrower than the exposing width W4 of the second barrier wall member 33, not yet exposed part in the exposure projection region of the exposed part 33-1 of the second barrier wall member 33 is exposed to form a new exposed part 32-2-1 in the first barrier wall member 32. It is developed and unexposed parts 32-2, 33-2 are removed and then first and second barrier walls 34, 35 are formed collectively by self-alignment thus forming the inner wall face of an ink pressurizing chamber 36 having no level difference.
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