| 摘要 |
PROBLEM TO BE SOLVED: To position a rectangular substrate at a standard position on a substrate transfer robot device, to eliminate alignment in advance and to position the rectangular substrates of different sizes at the standard position at the time of transferring rectangular substrates in a stationary state to different positions by holding them. SOLUTION: This substrate transfer robot device 1 to transfer a glass substrate W in a stationary state by holding it is furnished with aligners 11, 11 and rotary clamp cylinders 12, 12 to position the substrate W to a standard position by moving from two directions roughly orthogonal with an opposed end surface of the substrate W and a control device 203 to carry out specified driving control in a state where the glass substrate is positioned on a placing surface of hands H1, H2 and it moves to a stand-by position. |
