CASE FOR STORING AND TRANSPORTING MEMBER FOR FABRICATING SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a case for storing and transporting a member for fabricating a semiconductor device, capable of controlling contamination of a wafer, a reticle or the like for a semiconductor due to adhesion of particles and preventing the electrostatic breaking of these device patterns. SOLUTION: The case for storing and transporting a member for fabricating a semiconductor device has a bottom tray 10 on which the member such as a reticle 12 is set and an upper lid 20 for covering the bottom tray 10. The bottom tray 10 is formed of a polycarbonate to which carbon is added, and the upper lid 20 is formed of a non-conductive plastic resin.