CLEANING METHOD AND CLEANING DEVICE FOR COATING HEAD AND MANUFACTURING METHOD AND MANUFACTURING DEVICE FOR COLOR FILTER USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a cleaning method and cleaning device for a coating head, which is capable of performing high quality film forming with high productivity by enabling to clean the peripheral part of a slit die without the wear of a cleaning tool and the slit die or the adverse effect on a coated material due to the deterioration of a coating liquid and a manufacturing method and manufacturing device for a color filter using the cleaning method and cleaning device. SOLUTION: In the method and device of the coating head for cleaning the periphery of the discharge port of the coating head for discharging the coating liquid from the discharge port, a sticking material stuck to the periphery of the discharge port of the coating head is stripped by the collision with a gas and the stripped sticking material and the gas are recovered and the manufacturing method and device for the color filter uses the above cleaning method and device.