RUBBER COMPOSITION HAVING PLASMA RESISTANCE

摘要

PROBLEM TO BE SOLVED: To provide a rubber composition having extremely excellent in durability (plasma resistance) in a plasma atmosphere in comparison with that of the existing composition while being inexpensive, and a rubber material for plasma-treating apparatus, composed of the above rubber composition. SOLUTION: This rubber composition having plasma resistance is characterized by including an ethylene-propylene-diene terpolymer and a sulfur-based crosslinking agent in an amount of <=10 pts.wt. and/or a sulfur-based crosslinking promoter in an amount of <=10 pts.wt. based on 100 pts.wt. ethylene- propylene-diene terpolymer in the rubber composition for forming a member used in a plasma gas atmosphere. This rubber material for plasma treating apparatus is obtained by molding the above rubber composition having plasma resistance in a prescribed shape and crosslinking the molded product.