| 摘要 |
PROBLEM TO BE SOLVED: To provide a fine pattern forming device or a repairing device for accurately and easily forming/repairing a fine pattern with reduced initial cost. SOLUTION: The repair is performed by continuously making a liquid material flow out from a pipette to an omission part of a line forming the fine pattern by forming a line-like film. As a result, a work to arrange the shape of a repairing coating film is dispensed with to reduce initial cost. |
