发明名称 SPINDLE MECHANISM FOR DRIVING SUBSTRATE PROCESSING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a spindle mechanism capable of accelerating rapidly and rotating a rotary cup at high speed while reducing weight and size of a spindle driving part to improve maintenance efficiency. SOLUTION: From a driving gear 31, such as plural small-sized AC servomotors 51, or the like, disposed on an upper surface and a lower surface of a gear box 25, a driving force is transmitted to a main shaft gear 32 fixed to a main shaft 27. Thus, the small-sized AC servomotors 51 can achieve an equivalent torque with a large-sized AC servomotor by used in plural.
申请公布号 JP2001252844(A) 申请公布日期 2001.09.18
申请号 JP20000062110 申请日期 2000.03.07
申请人 TATSUMO KK 发明人 UNO HIROSHI
分类号 B23Q5/10;(IPC1-7):B23Q5/10 主分类号 B23Q5/10
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