发明名称 Stacked piezoelectric element and producing method therefor
摘要 A stacked piezoelectric element includes a plurality of piezoelectric layers and electrode layers stacked alternately in which the electrode layers are electrically connected by a penetrating electrode formed in a conductive hole formed in a direction of the thickness of the piezoelectric layers. The penetrating electrode formed in a piezoelectric layer of a first layer is positioned to overlap with the penetrating electrode formed in a piezoelectric layer of a first layer in the direction of thickness.
申请公布号 US6291932(B1) 申请公布日期 2001.09.18
申请号 US19990251494 申请日期 1999.02.17
申请人 CANON KABUSHIKI KAISHA;TAIHEIYO CEMENT CORPORATION 发明人 MARUYAMA YUTAKA;KOJIMA NOBUYUKI;EZAKI TORU;YAMAKAWA TAKAHIRO
分类号 H01L41/047;H01L41/083;H01L41/24;(IPC1-7):H01L41/047 主分类号 H01L41/047
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