发明名称 |
Stacked piezoelectric element and producing method therefor |
摘要 |
A stacked piezoelectric element includes a plurality of piezoelectric layers and electrode layers stacked alternately in which the electrode layers are electrically connected by a penetrating electrode formed in a conductive hole formed in a direction of the thickness of the piezoelectric layers. The penetrating electrode formed in a piezoelectric layer of a first layer is positioned to overlap with the penetrating electrode formed in a piezoelectric layer of a first layer in the direction of thickness.
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申请公布号 |
US6291932(B1) |
申请公布日期 |
2001.09.18 |
申请号 |
US19990251494 |
申请日期 |
1999.02.17 |
申请人 |
CANON KABUSHIKI KAISHA;TAIHEIYO CEMENT CORPORATION |
发明人 |
MARUYAMA YUTAKA;KOJIMA NOBUYUKI;EZAKI TORU;YAMAKAWA TAKAHIRO |
分类号 |
H01L41/047;H01L41/083;H01L41/24;(IPC1-7):H01L41/047 |
主分类号 |
H01L41/047 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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