发明名称 Method for making MOS transistors
摘要 An improved method of forming an MOS transistor, which includes forming a polysilicon layer on a silicon dioxide layer, which is formed on a substrate. After etching the polysilicon and silicon dioxide layers to define a gate electrode and a gate oxide, dopants are implanted into the substrate. Following that implantation step, the exposed portion of the gate oxide is cleaned and sealed.
申请公布号 US6291299(B1) 申请公布日期 2001.09.18
申请号 US19990419766 申请日期 1999.10.14
申请人 INTEL CORPORATION 发明人 CHU CHARLES
分类号 H01L21/336;(IPC1-7):H01L21/336 主分类号 H01L21/336
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