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发明名称
摘要
申请公布号
JP3208931(B2)
申请公布日期
2001.09.17
申请号
JP19930152278
申请日期
1993.06.23
申请人
发明人
分类号
C23C16/50;C23C16/509;C23F4/00;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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