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发明名称
摘要
申请公布号
JP3208937(B2)
申请公布日期
2001.09.17
申请号
JP19930179807
申请日期
1993.06.25
申请人
发明人
分类号
C23C16/52;H01L21/205;(IPC1-7):H01L21/205
主分类号
C23C16/52
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