Machine for coating hollow bodies

摘要

Gas feed pipes on a supporting plate(3) insert into hollow products(1) supported by a flat carrier plate(2) and the whole unit moves in and out of an evacuatable process chamber(8) with a microwave unit(12) and resonator(13). The carrier plate has a matrix of product holding positions(22) with which the gas feed pipes are vertically aligned. A vertical dividing wall(15) with a corresponding matrix of holes is mounted on the machine frame. A drive unit(23) moves the carrier and gas pipe supporting plates horizontally in and out of the machine.