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发明名称
PRECURSOR FOR CHEMICAL VAPOR DEPOSITION OF ALUMINUM THIN FILM AND PREPARING THE SAME
摘要
申请公布号
KR100289945(B1)
申请公布日期
2001.09.17
申请号
KR19980038572
申请日期
1998.09.15
申请人
UP CHEMICAL CO LTD
发明人
SHIN HYUN KUK
分类号
C07F5/06;C23C16/20
主分类号
C07F5/06
代理机构
代理人
主权项
地址
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