APPARATUS COMPOSED OF SEMICONDUCTOR SILICON FOR SENSING ACCELERATION

摘要

PURPOSE: An apparatus composed of a semiconductor silicon for sensing an acceleration is provided to prevent a damage due to the overrange without interfering the final output of a sensor by compensating for a displacement in itself even if the structure of the sensor is moved. CONSTITUTION: Four vibration-mass unit(20) generate a force proportional to the magnitude of an acceleration when an external acceleration to be measured is generated, wherein the center of each vibration-mass unit is composed of crossed X and Y axes. A spring unit(22) connects the vibration-mass units(20) to a supporting member to make it to easily be moved. A mobile electrode(24) converts into an electrical signal the magnitude of a displacement proportional to the acceleration of the vibration-mass units(20). The mobile electrode(24) is provided on the vibration-mass units(20) and a fixed electrode(26) is placed on an outer supporting member.