METHOD OF FORMING THIN FILM FOR LIGHT EMITTING DEVICES

摘要

PURPOSE: A method of forming thin film for light emitting devices is provided to selectively form a film of an electro luminescence material without a waste by evaporation where the electro luminescence material is controlled by an electric field using a mask. CONSTITUTION: When a material for forming an electro luminescence layer is deposited, a mask(113) is provided between a sample boat(111) and a substrate(110). By applying voltage to the mask(113), the direction of progress of the material for forming the electro luminescence layer is controlled to be selectively deposited at a desired location. Further, the accuracy of positioning the location of film formation can be improved by using a plurality of masks.