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发明名称
METHOD AND APPARATUS FOR HF-HF CLEANING
摘要
申请公布号
KR20010087380(A)
申请公布日期
2001.09.15
申请号
KR1020017005237
申请日期
2001.04.26
申请人
发明人
分类号
H01L21/306
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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