发明名称 WAFER STORAGE BOX
摘要 PURPOSE: A wafer storage box is to prevent contamination of a wafer due to particles by reducing friction of a box material and a cassette material generated at a contact surface of the box and the cassette. CONSTITUTION: A wafer storage box(200) comprises a body(210) of plastic material and a low oscillating stub. The low oscillating stub consists of a central stub(230) and an outer stub(240) and is inserted into a hole(H) formed at a bottom surface(220) of the body and closely engaged with the bottom surface. The hole is formed to pass through the bottom surface of the body. A round projection is provided at a central stub to support a recess formed at a bottom surface of a cassette. The low oscillating stub is made of a friction resistant material and is engaged with the hole in an adhesive manner or in a non-adhesive manner. The stub is an insertion type stub or a welding adhesion type stub. The term of low oscillating means that when the cassette containing the wafer is mounted to the box or when the box is moved to a place at which a semiconductor process is accomplished, particles are rarely generated.
申请公布号 KR20010086857(A) 申请公布日期 2001.09.15
申请号 KR20000010780 申请日期 2000.03.03
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 HAN, YUN SU;KIM, HYEOK GI;LEE, OK SEON
分类号 H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/68
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