SUBSTRATE CARRYING DEVICE, SUBSTRATE CARRYING METHOD, CONTAINER SUPPLY DEVICE, SEMICONDUCTOR MANUFACTURING DEVICE, AND SEMICONDUCTOR DEVICE PRODUCING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a substrate carrying device where the measures for pinched foreign objects are provided, a substrate carrying method, a container supplying device, a semiconductor manufacturing device, and a semiconductor device producing method using it regarding the transportation of substrate by the mini environment system. SOLUTION: In the container carrying means for moving a closed container 1 having a front door 3 that can be opened or closed and accommodates a substrate 2 and pressing the container 1 to an outer wall 14 of the semiconductor manufacturing device, the control of the container carrying means is changed as the measures for pinched foreign objects between the container 1 and the outer wall 14 of the semiconductor manufacturing device.