| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an array of field emission electron sources, including its manufacturing method, which maintains a uniform emission current, has a current limiting mechanism and is capable of reducing flickers of a thin image recorder and improving mechanical reliability. SOLUTION: This array of field emission electron sources has a configuration in which respective field emission electron sources 5 are divided and distributed to the micro-spaces 10 and connected to a resistance layer 4 in parallel. The array consists of a field emission material and an adhesive material, and an insulation material 3 having the micro-spaces 10 consist of porous alumina. The manufacturing method of the array for the field emission electron source specifies that the materials dispersed and composed of the resistance material, electron emission material and adhesive material are subsequently filled and formed in the micro-spaces 10 of the insulation material 3 formed on the cathode electrode wiring 2 by means of an electrochemical deposition method. In addition, the insulation material 3 having the micro-spaces 10 is formed by being pasted directly to the same material, by means of the anodic oxidation applied to the deposited film made by a patterned metal thin-film or to the aluminum foils pasted with each other.</p> |
