INSPECTION METHOD AND DEVICE FOR APPEARANCE SHAPE OF SPECIMEN

摘要

PROBLEM TO BE SOLVED: To provide an inspection method and device for appearance shape of a specimen which suppresses the increase in equipment cost and space, is superior in work efficiency and is accurate in judgment. SOLUTION: A first photograph means 4 photographs the line part with a first slit light irradiated to the specimen to obtain appearance data. Simultaneously a second photograph means 5 photographs the same line part with the second slit light irradiated with the line part to obtain shape data. From the appearance data and the shape data of the line part, good or bad of the appearance and shape of the body to be inspected is judged.