发明名称 DRIVE DEVICE FOR VIBRATION ACTUATOR
摘要 PROBLEM TO BE SOLVED: To improve accuracy and speed of control by causing a vibration actuator to stop rapidly. SOLUTION: Drive signals, amplified by amplifier circuits 23a 24a, are supplied to piezoelectric elements 12a, 12b of a driven vibration actuator 2. The amplifier circuits 23a, 24a have step-up transformers 25a, 25b in respective output parts. The transformers 25a and the piezoelectric element 12a, and the transformer 25b and the piezoelectric element 12b form respective resonance circuits. A resistance adding circuit 24a responds to a moving/stopping control signal from a control part 3, and adds a resistance component to the resonance circuit of the transformer 25a and the piezoelectric element 12a, when the actuator 2 is stopped. As a result, electric oscillation which is applied to the piezoelectric elements 12a, 12b by the resonance circuits, when the actuator is stopped is restrained, and unwanted vibration of the actuator 2 is restrained.
申请公布号 JP2001251874(A) 申请公布日期 2001.09.14
申请号 JP20000059694 申请日期 2000.03.06
申请人 NIKON CORP 发明人 SUZUKI TOMOAKI
分类号 H01L41/09;H02N2/00 主分类号 H01L41/09
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