METHOD OF MAKING GAS SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a method of making a small and power-saving gas sensor. SOLUTION: A solid electrolyte film 1 is formed on an insulating substrate 6 and heat treated and an electrically insulating film 4a is formed thereon. After a heater film 5 is formed thereon, the surface of the insulating substrate 6 on which the solid electrolyte film 1 is not formed is etched to bore a hole reaching the surface of the solid electrolyte film 1 on which the electrically insulating film 4a is not formed. A pair of electrode films 2a and 2b is formed on the bored surface and an oxide catalyst film 3 is formed on the electrode film 2a, whereby heat capacity can be made very small and power consumption can be greatly reduced.