| 摘要 |
PROBLEM TO BE SOLVED: To provide a fault analyzing method by which mistake of a defective shape is prevented and a defective shape can be accurately recognized and classified and a recording medium recording its program, a derivation method for degeneration threshold value used for a fault analyzing method, and a recording medium recording its program. SOLUTION: A recognition rule is read (ST1), plural degeneration FBM is prepared (ST2), after a defective recognition object is selected (ST3), the prescribed region is selected based on setting of defective size (ST4), and a defect rate in the prescribed region is calculated (ST5). Successively, a defective recognition object is estimated based on pars/fail condition of adjacency of a defect rate condition and a defective recognition object (ST6), a defect rate of residual degeneration FBM is calculated and standardized (ST7). Then a defect rate of residual degenerartion FBM is collated with a defective shape discrimination rule, and a defective shape is specified.
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