摘要 |
PROBLEM TO BE SOLVED: To provide a low-temperature device using a pulse tube refrigeration unit capable of raising the refrigerating capacity and besides keeping the cooling temperature stably. SOLUTION: A first cold stage connects the fellow cold ends of a first cold accumulator and a first pulse tube with each other. A first heat shield is thermally coupled with the first cold stage. The hot ends of a second cold accumulator and a second pulse tube are arranged outside the first head shield, and the cold ends are arranged within the heat shield. A second cold stage connects the fellow cold ends of the second cold accumulator and the second pulse tube with each other. A working gas supply means is connected to the hot ends of the first and second cold accumulator, and it periodically repeats the supply of working gas into the first and second cold accumulators and the recovery of the working gas from inside the first and second cold accumulators.
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