| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem that an insulating layer used for insulating a magnetic layer from a coil layer is formed of polyimide resin whose curing temperature is 350 deg.C or above in a conventional magnetic device, so that the magnetic layer deteriorates in resistivity due to heat applied when the insulating layer is formed. SOLUTION: The insulating layers 6, 8, and 10 of a thin film inductor are formed of novolak positive resist whose curing temperature is 250 deg.C or below, by which insulating layers can be formed at a lower temperature, and thus magnetic layers 5 and 9 can be prevented from deteriorating in resistivity.
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