| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and a method for gas refining in a greater amount wherein upon any impurity of helium gas, hydrogen gas, and other gases being removed, a low temperature impurity removal filter 52 is used but without the use of an adsorbent to remove any impurity for easy gas refining. SOLUTION: Noticing that any impurity is solidified and separated in low temperature gas, and is removed with a removal filter 52 with the construction of a freezing machine 33 and the removal filter 52, a gas refining apparatus removes and refines any impurity from gas by cooling gas involving the impurity. It includes a freezing machine 33 capable of cooling gas to very low temperature, and an impurity removal filter 52 for filtrating the impurity cooled and solidified to the very low temperature.
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