摘要 |
A silicon chip (1, 2) having a protective guard (3, 4) covering delicate microscopic structures on its surface, is optically aligned by using a microscope to view fiducials (5, 6) on the surface of the chip (1, 2). The protective guard (3, 4) either has an aperture (7, 8) or is optically transparent, to facilitate viewing of the fiducials (5, 6). The method is applicable to the precise alignment of modular ink jet printhead chips (1, 2) in a pagewidth printer.
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