QUARTZ ANTENNA WITH HOLLOW CONDUCTOR

摘要

A radio frequency "RF" antenna (10) for plasma ion source (30) is formed of a hollow metal conductor tube (12) disposed within a glass tube (14). The hollow metal tubular conductor has an internal flow channel (20) so that there will be no coolant leakage if the outer glass tube of the antenna breaks. A portion of the RF antenna is formed into a coil (16); the antenna is used for inductively coupling RF power to a plasma in an ion source chamber. The antenna is made by first inserting the metal tube inside the glass tube, and then forming the glass/metal composite tube into the desired coil shape.