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发明名称
Verfahren und Vorrichtung zur Bestimmung von kristallinen und polykristallinen Materialien in einem Untersuchungsbereich
摘要
申请公布号
DE19510168(C2)
申请公布日期
2001.09.13
申请号
DE19951010168
申请日期
1995.03.21
申请人
HEIMANN SYSTEMS GMBH
发明人
GEUS, GEORG
分类号
G01N23/201;G01V5/00;(IPC1-7):G01N23/207
主分类号
G01N23/201
代理机构
代理人
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地址
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