发明名称 |
DIAMOND-LIKE GLASS THIN FILMS |
摘要 |
A diamond-like glass film is disclosed. In specific implementations, the film includes a diamond-like glass containing at least about 30 atomic percent carbon, at least about 25 atomic percent silicon, and less than or equal to about 45 atomic percent oxygen on a hydrogen-free basis. The diamond-like glass film may be applied to various substrates. The invention is also directed to articles having a diamond-like glass film, methods of making the articles, and apparatus for making the film and articles. |
申请公布号 |
WO0166820(A1) |
申请公布日期 |
2001.09.13 |
申请号 |
WO2000US27885 |
申请日期 |
2000.10.10 |
申请人 |
3M INNOVATIVE PROPERTIES COMPANY |
发明人 |
DAVID, MOSES, M.;GATES, BRIAN, J.;NELSON, BRIAN, K.;HADDAD, LOUIS, C.;DUFRESNE, JOEL, R. |
分类号 |
C03C3/076;C03C17/02;C03C17/22;C09K11/02;C23C16/30;C23C16/42;C23C16/509;H05B33/14;(IPC1-7):C23C16/30 |
主分类号 |
C03C3/076 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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