摘要 |
A non-volatile memory device and a fabrication method thereof, wherein the non-volatile memory device includes first and second memory cells in a region of a semiconductor substrate where a word line crosses a bit line. Thus, one word line can control the operation of two memory cells, and the device requires less area. Further an intergate dielectric layer extends to the side walls of the floating gate allowing more area and a higher coupling ratio. A lower voltage may therefore be applied to the control gate. During an erasing operation the path of electrons can be redirected toward the substrate. Deterioration of a tunneling insulating layer is thereby reduced or eliminated.
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