发明名称 Non-volatile memory device and fabrication method thereof
摘要 A non-volatile memory device and a fabrication method thereof, wherein the non-volatile memory device includes first and second memory cells in a region of a semiconductor substrate where a word line crosses a bit line. Thus, one word line can control the operation of two memory cells, and the device requires less area. Further an intergate dielectric layer extends to the side walls of the floating gate allowing more area and a higher coupling ratio. A lower voltage may therefore be applied to the control gate. During an erasing operation the path of electrons can be redirected toward the substrate. Deterioration of a tunneling insulating layer is thereby reduced or eliminated.
申请公布号 US2001021561(A1) 申请公布日期 2001.09.13
申请号 US20010853637 申请日期 2001.05.14
申请人 SHONE MOON;KIM JI-NAM 发明人 SHONE MOON;KIM JI-NAM
分类号 H01L27/10;H01L21/8247;H01L27/115;H01L29/788;(IPC1-7):H01L21/20 主分类号 H01L27/10
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